Transistors is the number of transistors on the chip. You can see that the number of transistors on a single chip has risen steadily over the years.
Microns is the width, in microns, of the smallest wire on the chip. For comparison, a human hair is 100 microns thick. As the feature size on the chip goes down, the number of transistors rises.
Clock speed is the maximum rate that the chip can be clocked at. Clock speed will make more sense in the next section.
Data Width is the width of the ALU. An 8-bit ALU can add/subtract/multiply/etc. two 8-bit numbers, while a 32-bit ALU can manipulate 32-bit numbers. An 8-bit ALU would have to execute four instructions to add two 32-bit numbers, while a 32-bit ALU can do it in one instruction. In many cases, the external data bus is the same width as the ALU, but not always. The 8088 had a 16-bit ALU and an 8-bit bus, while the modern Pentiums fetch data 64 bits at a time for their 32-bit ALUs.
MIPS stands for "millions of instructions per second" and is a rough measure of the performance of a CPU. Modern CPUs can do so many different things that MIPS ratings lose a lot of their meaning, but you can get a general sense of the relative power of the CPUs from this column.

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